Application & DRE：

Hydride gas  (AsH3>99%  PH3>99%,GeH4,SiH4)   
Acid gas  (BF3>99%,BF3,BCl3,Cl2)
Metal organics
SiH4,SiF4,COF2,XeF2,HF,F2,PF3,WF6,TaF5,SOF2,SO2F2
Al2Cl3,Al2Cl6,B2O3,B(OH)3,HCl,COCl2,TiCl4,HF,F2,HCl,NH4Cl,TBA,TDMAT,TiCl4,B2H6,
ClF3,TEOS,HBr,NH3,SiH2Cl2
H2Se.H2S.COF2(Hydrid可處理)
CO(CO觸媒可處理)
VOC,IPA(氧化觸煤可處理)

處理對象氣體    最大流入氣體濃度    流出氣體濃度      
CO                      2%                              小於25PPM (TLV-TWA值)
SiF4                    2%                              小於0.5PPM asHF (TLV-TWA值)
Process：
Etching 、Ion Implantation
Waste gas abatement in all LP/PE CVD processes, ion implantation, and epitaxial
processes.The Dry Bed Absorber offers  a safe, efficient and reliable point-of-use
abatement solution for the semiconductor,photovoltaic and related industries.
Providing a non revesable chemical capture.
The following applications are supported by ...ging the reactor (column) with
catalyst and/or absorbent ...ed according to the gases being abated:
*Abatement of fluorine, chlorine, and bromine gases used in dry-etch processes
*Abatement of WF6 and other gases used in tungsten CVD processes
*Abatement of AsH3 and other gases used in MO-CVD processes

Absorbent Type  local scrubbers are designed for efficient treatment of exhaust gases emitted during various processes.The scrubbers cab be applied for processes like dry erch,implant,PVD,CVD etc.The system uses a barrel filled with chemical absorbent,exhaust gas is passed through the barrel where it treated through physical and chemical absorption,here chemical reaction between target gas and chemical absorbent take place at room temperature.No flame,electricity or water is needed during the process,the used absorbent can be recycled,and thus it makes the whole treatment process safe and eco-friendly.This system can be designed as per different parameters of treatment requirements and best results can be achieved through combination of barrel capacity and absorbent type.
Absorbent Type 化學吸附式處理設備,面對半導體領域多種製程廢氣的無害化處理,可有效去除乾法蝕刻,離子注入,物理氣相沉積,化學氣相沉積等製程產生的有害氣體.該產品透過吸附桶中吸附材與目標氣體發生物理吸附和化學反應方式處理尾氣,具備沒有明火,用電量低,無需水資源消耗,反應過程常溫安全,廢料可回收環保處理等特點,並可根據氣體處理要求設計不同規格產品,實現最優的吸附桶容量和吸附材配方設計,為客戶創造最大價值.

Advantage:

Delivers continuous operation, 24 hours a day, 365 days a year.
Uses catalysts.
Incorporates filtration technology for removing particulate matter.
Forced air design accelerates oxidation.
Features a longer maintenance cycle and improved safety.
IPI-Adsorbent systems is a high-end dry type waste gas abatement system featuring a variety of control functions designed to facilitate smooth manufacturing equipment operation as well as a special structure capable of continuous waste gas abatement over the long term.
High abatement efficiency:High decomposition & removal performance
Transfer of contaminants from gas to solid materials
Built in by-pass system, avoid process interruption  
Epochal saving operation cost

Treatment for soluble gases
Long PM Cycle
Easy maintenance
Easy operation
Compatible with wet scrubber
Approved by SEMI S2
Zero water consumption
High gas flow & high treatment capacity
Zero down time
Reduction of byproduct Gas  

Change adsorbent equipment do not stop
Non-toxic gases release process can handle the processing of such seal highly toxic AsH3, sealed structure can safely handle. Sealing process can handle such a highly toxic AsH3.
The water does not require, fuel gas such as SiH4  is useful if you can not handle with water.
Without using the fuel in order, there is no emission of CO2.
Safety interlocks including ,temperature,pressure,and gas detector.
High anti-corrosion design.
Cost reduce.
The majority of speciality process gases used in wafer processing, solar and MEMS manufacturing are either pyrophoric, toxic, or corrosive. Safety of personnel and protection of the environment are matters of the highest priority.
The IPI-Adsorbent waste gas abatement system removes hazardous process gases on the basis of chemical conversion (chemisorption) to stable salts at ambient temperature. No external heating, moisturisation, or other facilities are required for operation. Hence the IPI-Adsorbent system is fully passive, and is permanently on stand-by, even in the event of a power- or other facilities failure. 

IPI-Adsorbent systems customers worldwide avail of a local service for the collection and refilling of expended  IPI-Adsorbent  columns, which are patented, and reusable transport containers.
A wide range of  IPI-Adsorbent model sizes are available to meet the needs of all our customers- from small-scale university researchers to round-the-clock wafer fabrication.
The Scrubber has a well-established track record of success, particularly with processes such as LP-CVD and PE-CVD that generate little particulate matter.
All IPI columns are reusable transport containers for the transportation of dangerous goods.They are manufactured from high quality 316L stainless steel to ensure long working life,even on harsh process applications.
Column 2 is also available with built-in tower 2 tower type apparatus, are also available switching devices can be used.
Automatic switching system was also available.Sealing process can handle such a highly toxic AsH3
Operation by more safety design.
IPI dry absorber system uses advanced chemisorber technology to design waste gas abatement systems which are unmatched in their scrubbing efficiency, yet absolutely simple to operate.
IPI dry absorber systems consume neither electricity, water, nor fuel. Moreover, there is no contamination of precious water resources due to dis...ge of contaminated waste water - a major benefit in terms of eco balance.
IPI dry absorber systems granulate converts hazardous gases into stable inorganic salts at ambient temperature. It is the most elegant and environmentally friendly purification technology of exhaust gas abatement. A wide range of model sizes are available to meet the needs of all our customers, from small-scale university researchers to round-the-clock wafer fabrication. IPI dry absorber systems has over 25 years of experience in dry bed chemisorption technology and offers optimised solutions for all process applications.
Safeguard against emergency gas release.Hazardous release from gas cylinders poses a serious threat to environment and safety, owing to the high quantity of pressurised gas usually present in concentrated form. Gas leakages are known to have occurred: during transport of cylinders to factory; during storage of fresh cylinders; due to improper connection of fresh cylinder in gas cabinet; component failure, e.g. rupture of pressure regulator diaphragm; during storage of empty cylinders.