Application & DRE:
HCl>99%       Cl2>99%(+NaOH)    HBr>99%
NH3>99%       BCL3>99%                SiH4>99%
SiF4 、 HF 、 COF2 、 ClF3 、 HF 、 F2 、 SiHCl3 、 SiH2Cl2 、 SiCl4
、 POCl3 、 IPA
Process：
Solar 、LED 、 Thin Film、Etching 、 Poly/Metal Etch, 、 APCVD 、 Epi
 、 Nitride
EPI (High Flow/Solar applications)
PV Processes
Dedicated NH3 treatment for house separation
Purification Processes
Gas Cabinet Vent
Chemical Manufacturing
All water soluble process gasses
薄膜外延生長(EPI)
淨化處理
化學氣相沉積(CVD)
太陽能電池生產
蝕刻鐘ETCH)
氣瓶櫃(Gas Cabinet)
原子層沉積(ALD)
Abatement of halogen gases,ammonia, and other gases used in processes such as Silicon Epitaxial, Metal Etch, Poly Etch dry-etch and CVD water soluble gases such as Cl2,HCl, HF, HBr, NH3, F2, BCl3, Chlorosilanes (SiHCl3, SiH2Cl2, SiCl4) and Flourosilanes (SiF4).   

The wet scrubber is a proven solution for the treatment of waste gases emitted in different CVD and etching applications. One advantage over common wet scrubbers is a special wet scrubber feature that reduces up to 99% of the dust particles in the waste gas flow. The absorbed dust particles are automatically dis...ged with the waste water.Another advantage of the IPI wet scrubber is the special design of the waste gas inlets, which successfully prevents the build up of solid reaction by-products.The wet scrubber can be installed as a stand alone unit (independent system) or upstream from an existing Burn-Wet as a pre-scrubber.
The wet scrubber is designed to treat HCl, HF, SiH2Cl2, SiCl4 and NH3, as well as other acidic and alkaline gaseous emissions efficiently, while keeping the CoO low.
Depending on the species that needs to be treated the wet scrubber is operated either with an alkaline or acidic neutralizing agent.

The packed media washing tower is equipped with high performance counter flow spray nozzles that provide significant reliability for applications with high waste gas flow rates.

The wet scrubber provides up to four independent inlets, each one equipped with a bypass, that can be connected to atmospheric and sub-atmospheric process chambers with up to 3,000 LPM total waste gas load.
Other great advantages are the unique N2 venturi and the heated inlets, that ensure low maintenance requirements and a low cost of ownership, especially for gases like WF6, BCl3, AlCl3 or NH4Cl, that tend to block the inlets over time.

Abatement of halogen gases, ammonia, and other gases used in processes such as dry-etch and CVDAbated gases: Cl2, ClF3, NH3, HCl, HBr, HF, BCl3, etc.(The Aqua II adds pump-driven mixing to the Aqua’s two-stage abatement process in order to deliver higher abatement efficiency. )

水洗式廢氣處理機是一台專門處理及分解各現場製程廢氣的系統，它運用了水溶解的方式，將製程所產生的廢氣溶解於水中並分解，再經由另一道程序的水處理而排放至廠務排放系統，所處理的廢氣包含大部份半導體廠、TFT-LCD、LED廠、磊晶廠所使用的特殊氣體。

Advantage:
  Low operation cost
  Approved by SEMI S2
  SiH4 ionization
  Longer maintains cycle time
  Ventrui’s tube design,4-step water cleaning function
  High efficiency small scrubber type gas abatement system. Equipped  with two units
  of scrubbers, can handle water-soluble and hydrolysable gas efficiently
  High performance and high removal efficiency.It realizes high performance and high
  efficient abatement by using a special combination of non-clogging gas inlet device,
 high flow spray chambers, and a unique packed column design.
A wet waste-gas scrubber is a system for treating and decomposing
Waste gases generated by production sites.
The system dissolves and decomposes process waste gases with water and dis...ge
the water into the plant draining system after another process of water treatment.
The scrubber is capable of treating most of special gases used by semiconductor
 manufacturers, TFT-LCD & LED makers, and Epitaxy Plants.

Safe for flammable gas incorporation.It is safe during unexpected flammable gas incorporation to our high specifcations related to explosive gases.
Safety interlocks including flow,temperature,pressure,and leak sensors.
Inlet with special design for prevent powder from condensing.
Special cooling design to prevent powder from accumulation.
High anti-corrosion design.
Space-saving footprint .Compact design.It is very compact because of our scrubber designs. It is possible to install in minimal space.

Excellent economic efficiency.Due to original design, it efficiently contacts gas-liquid and usesless water and electricity. It realizes low-running cost.
Lowest fresh water consumption in the industry - up to 50% less.
No foaming and no sediment.

Programmable logic scrubber control box automates gas inlet plunger to reactor functions and reports scrubber status.
Dramatically reduces initial costs.
Lightweight wet scrubber unit can be easily removed.
Dust reduction up to 99.99%, without troublesome dry dust disposal
Fully automated
Integrated process and system monitoring
Up to four process inlets can be operated simultaneously
Flexible customer design service
Waste gas flow up to 3,000LPM, with three different washing tower sizes available
Long PM cycle and short PM working time.Simple operation and maintenance
PLC control.
100% parts stock support in local
Technical support local directly.
Self-cleaning inlets for extended PM cycle
Destruction and removal efficiency (DRE) of up to 99.99 %
Improved particle reduction
Highest uptime greater than  99%
Waste gas inlets equipped with bypass valves
Explosion-proof design available
Monitoring interface for Ethernet or RS485
Minimal maintenace requirement and easy maintenace
Reduction of water consumption by circulation
Independent inlet/outlet pressure gauges
Furnished with multiple sensors including liquid level switches, pressure gauges, etc.
Gases are abated by a powerful 4-stage abatement process consisting of ...ged filter and gas-liquid contact via a shower.
In the event of a problem, the entire wet scrubber unit can be replaced.
Reliable treatment systems are critical to the productivity of advanced process tools. A treatment solution must have high uptime and be flexible enough to handle changing process and environmental needs. The Wet-type  series is uniquely to meet these challenges
The Wet-type series are is a proven solution for variety of processes including Etch and Epi. An extensive database of applications and removal efficiencies is used to customize the best solution for a given process.    The Wet-type series is a proven solution for Metal Etch processes. This system will treat up to four process effluent streams and is tailored to high particulate forming and Metal Etch processes.
The  wet scrubber is a proven solution for the treatment of waste gases emitted in different CVD and etching applications. One advantage over common wet scrubbers is a special  feature that reduces up to 99% of the dust particles in the waste gas flow. The absorbed dust particles are automatically dis...ged with the waste water.
Another advantage of the wet scrubber is the special design of the waste gas inlets, which successfully prevents the build up of solid reaction by-products.
This equipment is wet-type detoxification equipment for use in the etching process.It detoxifies CI2, HBr, BCI3, HCI, HF, F2, SiF4 and other target gases to or below a TLV (threshold limit value) that was not possible with conventional wet-type detoxification.
Because the adsorption columns are regenerated with water, the catridge lifetimes are long.
Causes no alkali pollution because it uses only water.
Reduces running costs due to the lower water consumption.
Provides proper protection against possible clogging with the improved air and liquid contact sections.
Continuous detoxification is possible by automatic switching between the operating adhesion columns.
Circulating water system applied:Minimizing water usage.
CPVC body:Prevention of corrosion
System to prevent blocking by inlet powder system required.
NOx free system
Simple maintenance through monitoring system
Minimizing the usage of water by supplying NaOH(option)
溼式洗滌系統
在處理各種化學氣相沉積和蝕刻製程所排出的廢氣方面,濕式洗滌系統已被證明是最有效解決方案之一,IPI溼式洗滌系統能夠降低廢氣中99%的灰塵顆粒,經吸附的灰塵顆粒將隨著廢水排出.
IPI溼式洗滌系統可以作為獨立系統來安裝,也可裝在Burn-Wet之後,灰塵的降低率和酸氣的吸附率一般超過99.9%
此系統專門設計來有效處理HCl.HF.SiH2Cl2.SiCl4.NH3以及其他酸性及鹼性氣體排放,且同時維持低運行成本.根據需要處理氣體種類的不同,溼式洗滌系統可使用酸性或鹼性中和劑.洗滌塔配備高效率的逆流噴嘴,為高流量廢氣的應用提供很高的可靠性.溼式洗滌系統提供了多達4個獨立的進氣口,該進氣口可以連接至高達3000LPM廢氣總流量的大氣壓力或大氣壓力以下的反應腔.
其他的優勢包括:獨特的N2氣體文式管,水式文式管,機械式廢氣輸入口清潔裝置,取決於廢氣負荷量的清水加藥,以及加熱輸入口(選配).所有的這些特色都是為了確保低維護需求和低運行成本(尤其是針對像AlCl3和NH4Cl,這類往往過一段時間便會阻塞輸入口的氣體.
高達99.99%的減塵效率,不需使用棘手的乾式灰塵處理
只需要水就可去除特殊有害氣體
具備大流量氣體流入能力的溼式排氣處理裝置
多段式高溶解效率洗滌設計,氣體處理效率高
文式管洗滌設計,氣體補捉效率高
採用特殊的入口設備,降低氣液接觸面的生成物附著程度
強大的水循環能力可防止管路阻塞
Inlet和Outlet壓力電子自動偵測
周延的安全考量,人機介面操作模式,彩色液晶螢幕顯示控制器。
省水省電省氣模式,低操作成本
擁有成本最低
Bypass(Option)
機械室廢氣輸入口清潔裝置
取決於廢氣負荷量的清水加藥(非持續性)
停機時間最短
結果簡單,可以實現低操作成本CoO)
客製化服務,可對應任何氣體流量
設計簡單,維護容易,最少的維修保養
PM週期長,且PM時間短,最快的維修保養
可靠性最高
佔地面積小
SEMI-S2 認證。
獨立的 Inlet 和 Outlet 壓力表頭。
設有多項偵測器，包含：水位、壓力錶 … 等。
設有1~6個廢氣處理入口端。
零件供應充足
到廠技術服務
水洗式廢氣處理機是一臺專門處理及分解各現場製程廢氣的系統，它運用了水溶解的方式，將製程所產生的廢氣溶解於水中並分解，再經由另一道程序的水處理而排放至廠務排放系統，所處理的廢氣包含大部份半導體廠、磊晶廠所使用的特殊氣體。
半導體製程水洗機台專用產品(腔體會因化學反應而發熱)特點Features:
High quality plastic chamber material can prevent corrosion by any acid liquid to extend the life of equipment.
腔體採用高品質塑膠材質,有效預防酸性尾氣處理後產生高酸性液體對設備的腐蝕,延長設備壽命

The multi-section washing nozzle designation can increase contact times and area between water and process gas to reach over 99% treatment efficiency.
多段式噴嘴的專利設計,可有效增加水與製程尾氣接觸,有害氣體處理效率可達99%以上
Adopt high tech PLC system to reduce electric consumption and energy consumption is better than other scrubber field.
影響節能環保及低營運成本的客戶要求,設備採用PLC控制系統,耗電量優於業界.
專利設計的循環節水裝置,透過清洗用水的重覆利用.大量減少耗水.

CMS ( Center Monitor System ) 中央監控系統
Auto mass powder process
Flash Arrester for anti back fire
Gas Detector for individual process gases氣體偵測器
PH Sensor / Controller氣體偵測器/水質酸鹼測量供應系統
Cabinet exhaust pressure alarm
Inlet By-Pass Control to backup scrubber for supporting
APC (Auto Pressure Control)
Remote Monitor System
Burn Box for pressure alarm
Chemical dosing system.自動加藥設計
Exhaust Blower出口端風車
Extension LCD Monitor Controller
Auto By Pass System
Heating Jacket加熱帶
Capacity:100LPM~10000LPM皆可客製化供應
*SBW-SAB :1200W*700D*2000H(New/Slim)
*WS-666S:500W*400D*1600H(New/Compact)