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首頁>商品介紹>Wet Thermal PFC Catalyst>GHA-600U
GHA-600U
|
Model Name |
GHA-600U |
|
Type |
Wet-Thermal (Catalyst)-Wet |
|
Dimensions (mm) |
970W x 930D x 1850H |
|
Weight |
600Kg |
|
Total Flow Rate |
300LPM |
|
Temperature (For Processing Gas) |
680(550~750)ºC |
|
Max. No. of Inlet ports |
Up to 3 |
|
Inlet Port Type |
3x NW50 (2x ISO80/KF80 Option) |
|
Outlet Port Type |
1 x ISO100 |
Application & DRE： Target abatement gas
1.PFC Gases : CF4>95% , SF6>99%, NF3>99% , C2F6>99% , C3F8>99% ,
C4F8>99% , etc.
2.Toxic gases: NF3>99%
B2H6,NH3,PH3,AsH3O3,H2S,H2Se
Except SiH4
Process：
Solar、Thin Film、Etching
Advantage:
1. Type: Wet-Thermal PFC Catalyst-Wet , Fluorine dry scrubber.
2. High abatement efficiency for PFC gases.
3. No toxic by-products (NOx, SOx)
4. Excellent safety interlock system.Safety interlocks including flow,
temperature,pressure,and leak sensors.
5.Pre-heated functionality for drain in gases to enhance the processing
efficiency.
6.Special cooling design to prevent powder from accumulation.
7.High anti-corrosion design.
8. Relatively lower operation cost
9. Simple operation and easy maintenance(Simple change heater & catalyst)
10. SEMI-S2 certified
11.Good efficiency for SF6, C2F6, (NF3), CF4, C3F8 ,C4F8,B2H6,NH3,PH3,
AsH3,O3
12. Allows full decomposition of CF4, C2F6, C5F8 and other PFC
(perfluorocarbon), and SF6 and HFC. Eliminates the need for propane and
other combustion fuels for the heater heating system, thereby minimizing the
emissions of CO2.
13. Eliminates the need for any ancillary facility. Offers space-saving and
lower-cost features.
14. Ensures improved safety(flame and fuel are not necessary.)
15. Causes no NOx generation due to the relatively lower decomposition
temperature.
16.Catalyst type PFC Scrubber is the gas treatment device which uses catalyst based method to decompose and remove PFC gas from the semiconductor production process. CF4, SF6, NF3, C2F4are the most noticeable PFC gases.
17.A considerably high temperature exceeding 1300°C used to be required to decompose those gases, but the scrubber which uses the catalyst inducing a low temperature oxidation decomposition is the equipment capable of removing almost over 99% of PFC gases at the relatively range around 550~750°C.
18. IPI's FDS Systems (Fluorine Dry Scrubber) are capable to abate most PFC gases > 99.9%. The technology utilizes a heated proprietary catalyst that both destructs and captures the fluorine compound for ultimate PFC gas treatment. The FDS Systems do not require any special fuels or water to abate the PFCs resulting in low facility requirements and zero waste water generated. Perfect for facilities that have to reduce their PFC gas but lack the infrastructure to support combustion-wash and catalytic-wash technologies. 19. IPI's FDS Systems can abate PFCs over 99.9% without producing other harmful by-products like NOx, SOx and hazardous solid wastes. The exhausted reagents are not hazardous and can be recycled and used as raw materials for other industrial processes resulting in zero total waste.
1.PFC Gases : CF4>95% , SF6>99%, NF3>99% , C2F6>99% , C3F8>99% ,
C4F8>99% , etc.
2.Toxic gases: NF3>99%
B2H6,NH3,PH3,AsH3O3,H2S,H2Se
Except SiH4
Process：
Solar、Thin Film、Etching
Advantage:
1. Type: Wet-Thermal PFC Catalyst-Wet , Fluorine dry scrubber.
2. High abatement efficiency for PFC gases.
3. No toxic by-products (NOx, SOx)
4. Excellent safety interlock system.Safety interlocks including flow,
temperature,pressure,and leak sensors.
5.Pre-heated functionality for drain in gases to enhance the processing
efficiency.
6.Special cooling design to prevent powder from accumulation.
7.High anti-corrosion design.
8. Relatively lower operation cost
9. Simple operation and easy maintenance(Simple change heater & catalyst)
10. SEMI-S2 certified
11.Good efficiency for SF6, C2F6, (NF3), CF4, C3F8 ,C4F8,B2H6,NH3,PH3,
AsH3,O3
12. Allows full decomposition of CF4, C2F6, C5F8 and other PFC
(perfluorocarbon), and SF6 and HFC. Eliminates the need for propane and
other combustion fuels for the heater heating system, thereby minimizing the
emissions of CO2.
13. Eliminates the need for any ancillary facility. Offers space-saving and
lower-cost features.
14. Ensures improved safety(flame and fuel are not necessary.)
15. Causes no NOx generation due to the relatively lower decomposition
temperature.
16.Catalyst type PFC Scrubber is the gas treatment device which uses catalyst based method to decompose and remove PFC gas from the semiconductor production process. CF4, SF6, NF3, C2F4are the most noticeable PFC gases.
17.A considerably high temperature exceeding 1300°C used to be required to decompose those gases, but the scrubber which uses the catalyst inducing a low temperature oxidation decomposition is the equipment capable of removing almost over 99% of PFC gases at the relatively range around 550~750°C.
18. IPI's FDS Systems (Fluorine Dry Scrubber) are capable to abate most PFC gases > 99.9%. The technology utilizes a heated proprietary catalyst that both destructs and captures the fluorine compound for ultimate PFC gas treatment. The FDS Systems do not require any special fuels or water to abate the PFCs resulting in low facility requirements and zero waste water generated. Perfect for facilities that have to reduce their PFC gas but lack the infrastructure to support combustion-wash and catalytic-wash technologies. 19. IPI's FDS Systems can abate PFCs over 99.9% without producing other harmful by-products like NOx, SOx and hazardous solid wastes. The exhausted reagents are not hazardous and can be recycled and used as raw materials for other industrial processes resulting in zero total waste.