Processes:
The Burn-Dry Scrubber is designed for handling waste gas containing fluorine and a large amount of powder where high-temperature combustion is used for cracking fluorine gas in the waste gas. This plant is suitable for processes with high powder content. Cooled with cold air flow, the powder content is collected by way of a special physical design for the convenience of subsequent handling. Applicable to Semiconductor manufacturers, TFT-LCD makers, panel plants, thin film solar cell plants, etc.
Advantage:
1. Operation temperature 1100~1400°C for effective waste-gas treatment 2. Low consumption of natural gas for extremely high volume in waste gas treatment. 3. Power supply panel furnished with automated intelligent cooling system. 4. Touch-control LCD Display with Chinese interfaces for humanized operation.
5. Extension LCD Monitor Controller
6. Auto By Pass System (Option)
7. Furnished with 1~6 waste gas inlets.

8. Handling capacity :100~3000 LPM are avalable

9.In the IPI, an active flame front is produced by injecting a small quantity of hydrogen or methane fuel ignited by redundant, fail–safe ignitors.
10.Dilution air enters the chamber perpendicular to the process gas flow. This creates a swirling action for high efficiency air and process gas mixing.
11.The combustion chamber and gases are air-cooled, eliminating the need for water cooling. The cooled reaction gases exit the scrubber and flow to the house exhaust system.
12.Multiple safety interlocks provide a high level of safety during operation.  
13.Over 2,000 installations worldwide have proven the IPI series are safe and effective at treating flammable gases from process effluents and gas cabinet vent lines.
14.Instantaneous shutoff of fuel and igniters eliminates a potential ignition source from upstream gas flows.
15. High reliability with no mechanical parts .With no moving parts, maintenance intervals are extended with MTBF measured in years. IPI technology is a proven effective solution for thermal oxidation
16.Flexible fuel option : H2 or CH4
17.PLC Control System & RS 232/485 Interface
18.Enhanced safety with flashback arrestor assembly option(Option)
19.Semi S2 compliance
20.電源箱具有智慧型自動冷卻系統。
21.LCD 觸控式螢幕，中文介面，人性化操作。
22.燃燒乾式廢氣處理機是一個專門處理含氟性氣體及超大量粉層的廢氣處理系統，它利用高溫燃燒分解將製程所產生的氟性氣體裂解，適用於粉層量多的製程，藉由風冷的方式降溫，並以特殊的物理設計將粉層集中收集，方便後續處理。適用於半導體廠、TFT-LCD廠、面板廠、薄膜太陽能廠 …等。
23.設有1~6個廢氣處理入口端。
24.處理量:可依客戶需求設計100~3000 LPM。
25.選購設備:出口端風車/CMS遠端監控系統/Auto-Bypass自動切換系統/ 加熱槍及加熱帶/水質酸鹼測量供應系統
26.作業溫度 1200~1400 度。
27.天然氣消耗量低，廢氣處理量非常大。