Application & DRE： Target abatement gas

B2H6,NH3,PH3,AsH3O3,H2S,H2Se
Except SiH4

Process：
 Solar、Thin Film、Etching
Advantage:
1. Type: Heat-Catalyst-Wet, Fluorine dry scrubber.
2. No toxic by-products (NOx, SOx)
4. Excellent safety interlock system.Safety interlocks including flow,
    temperature,pressure,and leak sensors.
5. Special cooling design to prevent powder from accumulation.
6.High anti-corrosion design.
7. Relatively lower operation cost
8. Simple operation and easy maintenance(Simple change heater & catalyst)
9. SEMI-S2 certified
10. NH3 decomposition and detoxifying equipment is primarily
intended for treatment of waste gas from the GaN manufacturing process.
11.An effective combination of ordinary-temperature dry detoxification and
catalyst decomposition based-detoxification ensures lower running costs,
 easier maintenance and less environmental impact.
12.Detoxifying equipment is designed to decompose NH3 by means of a
 catalyst into nitrogen and hydrogen, thereby achieving full detoxification.
13.Causes no NOx emission which can be the byproduct of NH3
detoxification by oxidization.
14.Because it is not a burner type (combustion type), there is no need for
propane supply equipment and drainage system.
15.Ensures that the target harmful gases in the detoxified gas are removed
in concentration.
16.The adsorption and regeneration type does not require replacement
of the after-treatment column detoxifying agent, yielding lower running costs.
17. Eliminates the need for any ancillary facility. Offers space-saving and
 lower-cost features.
18. Ensures improved safety(flame and fuel are not necessary.)