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首頁>商品介紹>Wet-EP>WEP-800S
WEP-800S
|
Model Name
|
WEP-800S
|
|
Type |
Wet-EP |
|
Dimensions |
740W* 690D* 700(mm) |
|
Weight |
80Kg |
|
Total Flow Rate |
400LPM |
|
Temperature (For Processing Gas) |
Room Temp |
|
Max. No. of Inlet ports |
Up to 2 |
|
Inlet Port Type (Option) |
1X ISO100 |
|
Outlet Port Type |
1 x ISO100 |
使用目的:
處理砷化鎵晶片雷射切割製程尾氣處理設備需求，其主要收集砷化鎵powder(奈米級)及處理高溫產生之AsH3 。 處理流程: 特氣先經過第一層過濾袋，將較大的Powder先收集，再使用核凝成長濕式靜電集塵器收集較小的Powder，最後利用藥劑處理AsH3 。
Application & DRE:
SiO2>95%
Process：
Thin Film、Etching 、Diffusion
WEP is an electrostatic dust collector for treatment of particle-containing
or aerosol-containing process waste gases of up to 90 m³/h like they
accrue, for example, in solar cell manufacturing. The system successfully
reduces the risk of exhaust blockage and can be used with the most
abatement devices.
The waste gas flows into a tank that functions at the same time as a
reservoir for the scrubbing water. The tank is equipped with nozzles for
pre-scrubbing, which saturate the gas with water and create a turbulent
flow. Afterwards, the waste gas is channeled into the electrostatic dust
collector tube, where the contained particles are then ionized and collected
in a grounded water film on the water wall. The electrostatic collector
reduces particle emissions of even the finest particles up to 99,9 %.
The filtered fine dust is suspended into the scrubber solution. The dust
collector is equipped with an automatic self-cleaning mechanism for the
emission electrodes.
The system prevents exhaust blockage through condensates by reducing
the overall carbon content of waste gases, and in addition, separates
dusts from the waste gases.
With waste gas flows are entered quickly into the system. Hot
waste gas enters a cooler and the tempature is reduced to the organic
compounds’ condensation temperature. Afterwards, aerosols are
channeled through separator columns, where it ionized, and condensed
components are deposited on grounded metal tubes. Then separated
condensate flows back into the tank where it is collected. It can be
pumped out automatically or drained manually.
使用目的:reservoir for the scrubbing water. The tank is equipped with nozzles for
pre-scrubbing, which saturate the gas with water and create a turbulent
flow. Afterwards, the waste gas is channeled into the electrostatic dust
collector tube, where the contained particles are then ionized and collected
in a grounded water film on the water wall. The electrostatic collector
reduces particle emissions of even the finest particles up to 99,9 %.
The filtered fine dust is suspended into the scrubber solution. The dust
collector is equipped with an automatic self-cleaning mechanism for the
emission electrodes.
The system prevents exhaust blockage through condensates by reducing
the overall carbon content of waste gases, and in addition, separates
dusts from the waste gases.
With waste gas flows are entered quickly into the system. Hot
waste gas enters a cooler and the tempature is reduced to the organic
compounds’ condensation temperature. Afterwards, aerosols are
channeled through separator columns, where it ionized, and condensed
components are deposited on grounded metal tubes. Then separated
condensate flows back into the tank where it is collected. It can be
pumped out automatically or drained manually.
Semiconductor and display processes:
Mixed acid and alkali gas effluent
Wet bench exhaust treatment
Fine particulate removal
Wet-EP濕式靜電集塵主要是利用微粒帶電及電場電荷異性相吸原理，著在極板上，再利用噴水去除微粒以達到粉塵去除之目的，但對奈米粉塵去除效果不佳。
因此使用核凝成長元件將奈米粉塵成長為微米粉塵，去除效率可提升至>95%。
Advantage:
Removal of nano-particles
To solve the problem of white smoke
Efficient reduction of condensable organic carbon compounds
Collection of the condensate in a tank
Collection of dust particles
High safety standards (all critical parameters are sensor monitored)
Efficient treatment of particle-containing or aerosol-containing waste gas flows
All solid particles suspended in liquid(no dry dust handling)
Extremely low particle emission
Interface to upstream abatement systems
The electrostatic condensate separator WEP reliably and cost-effectively
removes condensable organic compounds like those that accrue in
manufacturing fabs in the photovoltaic industry. Many of these organic
compounds have a bad odour and many of them are toxic. WEP is capable
of handling waste gas flows up to 600 m3/h. Separation rates are
above 90 %.
Packed bed wet scrubbing stage
Fog nozzle wetting stage
Electric precipitator
Precipitator auto rinse
Purge blower for E/P system high voltage contact insulation enclosure
Diaphragm pump drain standard / gravity drain option
Induction fan option
High abatement efficiency (white smoke elimination)
Acid and alkali gas scrubbing
Removal of fine particulate byproducts such as NH4Cl
Lower infrastructure cost option compared to adding segregated exhaust
HVM (high volume manufacturing) proven