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首頁>商品介紹>Wet-EP>WEP-800F
WEP-800F
|
Model Name |
WEP-800F |
|
Type |
Wet-EP |
|
Dimensions (mm) |
900Wx1200Dx1950H |
|
Weight |
400Kg |
|
Total Flow Rate |
500LPM |
|
Temperature (For Processing Gas) |
AMB |
|
Inlet Port Type (Option) |
1X NW50 |
|
Outlet Port Type |
1 x ISO100 |
Application & DRE:
SiO2>95%
Process：
Thin Film、Etching 、Diffusion
WEP is an electrostatic dust collector for treatment of particle-containing
or aerosol-containing process waste gases of up to 90 m³/h like they
accrue, for example, in solar cell manufacturing. The system successfully
reduces the risk of exhaust blockage and can be used with the most
abatement devices.
Semiconductor and display processes:
Mixed acid and alkali gas effluent
Wet bench exhaust treatment
Fine particulate removal
Wet-EP濕式靜電集塵主要是利用微粒帶電及電場電荷異性相吸原理，著在極板上，再利用噴水去除微粒以達到粉塵去除之目的，但對奈米粉塵去除效果不佳。
Removal of nano-particles
To solve the problem of white smoke
Efficient reduction of condensable organic carbon compounds
Collection of the condensate in a tank
Collection of dust particles
High safety standards (all critical parameters are sensor monitored)
Efficient treatment of particle-containing or aerosol-containing waste gas flows
All solid particles suspended in liquid(no dry dust handling)
Extremely low particle emission
Interface to upstream abatement systems
The electrostatic condensate separator WEP reliably and cost-effectively
removes condensable organic compounds like those that accrue in
manufacturing fabs in the photovoltaic industry. Many of these organic
compounds have a bad odour and many of them are toxic. WEP is capable
of handling waste gas flows up to 600 m3/h. Separation rates are
above 90 %.
Packed bed wet scrubbing stage
Fog nozzle wetting stage
Electric precipitator
Precipitator auto rinse
Purge blower for E/P system high voltage contact insulation enclosure
Diaphragm pump drain standard / gravity drain option
Induction fan option
High abatement efficiency (white smoke elimination)
Acid and alkali gas scrubbing
Removal of fine particulate byproducts such as NH4Cl
Lower infrastructure cost option compared to adding segregated exhaust
HVM (high volume manufacturing) proven
SiO2>95%
Process：
Thin Film、Etching 、Diffusion
WEP is an electrostatic dust collector for treatment of particle-containing
or aerosol-containing process waste gases of up to 90 m³/h like they
accrue, for example, in solar cell manufacturing. The system successfully
reduces the risk of exhaust blockage and can be used with the most
abatement devices.
The waste gas flows into a tank that functions at the same time as a
reservoir for the scrubbing water. The tank is equipped with nozzles for
pre-scrubbing, which saturate the gas with water and create a turbulent
flow. Afterwards, the waste gas is channeled into the electrostatic dust
collector tube, where the contained particles are then ionized and collected
in a grounded water film on the water wall. The electrostatic collector
reduces particle emissions of even the finest particles up to 99,9 %.
The filtered fine dust is suspended into the scrubber solution. The dust
collector is equipped with an automatic self-cleaning mechanism for the
emission electrodes.
The system prevents exhaust blockage through condensates by reducing
the overall carbon content of waste gases, and in addition, separates
dusts from the waste gases.
With waste gas flows are entered quickly into the system. Hot
waste gas enters a cooler and the tempature is reduced to the organic
compounds’ condensation temperature. Afterwards, aerosols are
channeled through separator columns, where it ionized, and condensed
components are deposited on grounded metal tubes. Then separated
condensate flows back into the tank where it is collected. It can be
pumped out automatically or drained manually.
使用目的:reservoir for the scrubbing water. The tank is equipped with nozzles for
pre-scrubbing, which saturate the gas with water and create a turbulent
flow. Afterwards, the waste gas is channeled into the electrostatic dust
collector tube, where the contained particles are then ionized and collected
in a grounded water film on the water wall. The electrostatic collector
reduces particle emissions of even the finest particles up to 99,9 %.
The filtered fine dust is suspended into the scrubber solution. The dust
collector is equipped with an automatic self-cleaning mechanism for the
emission electrodes.
The system prevents exhaust blockage through condensates by reducing
the overall carbon content of waste gases, and in addition, separates
dusts from the waste gases.
With waste gas flows are entered quickly into the system. Hot
waste gas enters a cooler and the tempature is reduced to the organic
compounds’ condensation temperature. Afterwards, aerosols are
channeled through separator columns, where it ionized, and condensed
components are deposited on grounded metal tubes. Then separated
condensate flows back into the tank where it is collected. It can be
pumped out automatically or drained manually.
Semiconductor and display processes:
Mixed acid and alkali gas effluent
Wet bench exhaust treatment
Fine particulate removal
Wet-EP濕式靜電集塵主要是利用微粒帶電及電場電荷異性相吸原理，著在極板上，再利用噴水去除微粒以達到粉塵去除之目的，但對奈米粉塵去除效果不佳。
因此使用核凝成長元件將奈米粉塵成長為微米粉塵，去除效率可提升至>95%。
The IPI Particle filter has been specially designed for the semiconductor and photovoltaic industry in order to separate even small dust particles from the exhaust stream, like those that are generated during the thermal treatment of CVD gases.
The dusty air is redirected to the filter elements where the dust particles accumulate on the filter surface and are removed by an air pulse on the fly during operation. To keep the pressure surge as low as possible and to ensure a constant air flow, the filter elements are divided into 4 groups, which can be cleaned individually. Furthermore, the IPI Particle filter is equipped with a frequency-controlled fan, which compensates the differential pressure fluctuations of the filter elements. The contamination-free disposal of dust can be performed during operation, since the particle filter is equipped with an intermediate flange that uncouples the collecting tank from the filter unit.
The dusty air is redirected to the filter elements where the dust particles accumulate on the filter surface and are removed by an air pulse on the fly during operation. To keep the pressure surge as low as possible and to ensure a constant air flow, the filter elements are divided into 4 groups, which can be cleaned individually. Furthermore, the IPI Particle filter is equipped with a frequency-controlled fan, which compensates the differential pressure fluctuations of the filter elements. The contamination-free disposal of dust can be performed during operation, since the particle filter is equipped with an intermediate flange that uncouples the collecting tank from the filter unit.
•Differential pressure controlled purge of the filter elements
•Max. waste gas flow: 200-400 Nm³/h
•Max. waste gas inlet temperature: 20-40°C.
•Built-in frequency controlled radial fan
•Motor drive with built-in temperature monitoring and negative pressure control
•Valves and motor drive are not exposed to the exhaust air
•Optional level monitoring of the collecting tank with a load cell
Differential pressure controlled purge of the filter elements
Max. waste gas flow: 200-400 Nm³/h
Max. waste gas inlet temperature: 20-40°C.
Built-in frequency controlled radial fan
Motor drive with built-in temperature monitoring and negative pressure control
Valves and motor drive are not exposed to the exhaust air
Optional level monitoring of the collecting tank with a load cell
Removal of nano-particles
To solve the problem of white smoke
Efficient reduction of condensable organic carbon compounds
Collection of the condensate in a tank
Collection of dust particles
High safety standards (all critical parameters are sensor monitored)
Efficient treatment of particle-containing or aerosol-containing waste gas flows
All solid particles suspended in liquid(no dry dust handling)
Extremely low particle emission
Interface to upstream abatement systems
The electrostatic condensate separator WEP reliably and cost-effectively
removes condensable organic compounds like those that accrue in
manufacturing fabs in the photovoltaic industry. Many of these organic
compounds have a bad odour and many of them are toxic. WEP is capable
of handling waste gas flows up to 600 m3/h. Separation rates are
above 90 %.
Packed bed wet scrubbing stage
Fog nozzle wetting stage
Electric precipitator
Precipitator auto rinse
Purge blower for E/P system high voltage contact insulation enclosure
Diaphragm pump drain standard / gravity drain option
Induction fan option
High abatement efficiency (white smoke elimination)
Acid and alkali gas scrubbing
Removal of fine particulate byproducts such as NH4Cl
Lower infrastructure cost option compared to adding segregated exhaust
HVM (high volume manufacturing) proven