Advantage:

•         Emergency Dry Bed Absorber Systems for waste gas treatment

•         The IPI DS-11E emergency absorber was specifically designed to offer you a safe and efficient disposal of the contaminated gas exhaust of gas cabinets or gas valve boxes in the case of average.

•         A further application area where the DS-11E emergency absorber is successfully used, are processes with high volume flows and low concentrations of harmful gases, like for example the exhaust of load- and unloadlocks.

•         TheDS-11E emergency absorber is also an alternative for processes, for which all other methods are uneconomic.

•         Emergency Dry Bed Absorber Systems for waste gas treatment

•         The DS-11E emergency absorber was specifically designed to offer you a safe and efficient disposal of the contaminated gas exhaust of gas cabinets or gas valve boxes in the case of average.

•         A further application area where the DS-11E  emergency absorber is successfully used, are processes with high volume flows and low concentrations of harmful gases, like for example the exhaust of load- and unloadlocks.

•         The DS-11E emergency absorber is also an alternative for processes, for which all other methods are uneconomic, such as the disposal of H2Se, which is used among others in the thin-film photovoltaics.

•         The concept for the DS-11E emergency absorber is based on a modular design of the absorber units, which allow a flexible adaptation to individual customer's applications. The design criteria for this are in addition to the total gas capacity, the volume flow and the gas species.
For specific applications we use one or more different granules, which absorb the toxic, corrosive and/ or inflammable products and by-products. Because of the irreversible chemical reaction with the granules at room temperature, the harmful gases are converted into non-volatile, inorganic solids.

•         To ensure a smooth production, we offer all our customers a sophisticated cartridge exchange and granule disposal service - worldwide. In detail this means that upon customer’s request a newly filled cartridge is shipped. The customer is than either replacing the cartridge on his own, alternatively the exchange will be carried out by our service team. The pick-up service of the spent cartridge and the disposal of the used up granules is organized by IPI, while the customer will receive a proof of waste disposal.

•         Destruction and removal efficiency (DRE) of up to 99.99 %

•         Removal efficiency performance meets Threshold Limit Value (TLV) requirements

•         Specifically designed granules for semiconductor and photovoltaic applications

•         Irreversible conversion of hazardous gases to stable inorganic solids

•         No waste gas desorption due to chemisorption

•         Fast reaction rates require only short retention times

•         Passive system:If the DS-11E is installed as a passive emergency absorber downstream from gas cabinets or gas valve boxes, no sensor / actuator technology is required. Since the system works completely passive, no additional operating costs are incurred for spare parts and sensor testing. Depending on the granules and the installation site, a lifetime of up to three years can be achieved.

•         Active system:If the DS-11E is installed as an active emergency absorber downstream from gas cabinets or gas valve boxes, gas sensors and valves are required. When a gas leak is detected, the valves redirect the contaminated exhaust gas flow to the absorber. Depending on the granules and the installation site, a lifetime of up to five years can be achieved.

•         The concept for the DS-11E emergency absorber is based on a modular design of the absorber units, which allow a flexible adaptation to individual customer's applications. The design criteria for this are in addition to the total gas capacity, the volume flow and the gas species.

•         For specific applications we use one or more different granules, which absorb the toxic, corrosive and/ or inflammable products and by-products. Because of the irreversible chemical reaction with the granules at room temperature, the harmful gases are converted into non-volatile, inorganic solids.

•         Integrated waste gas and inlet pressure monitoring (optional)

•         Low media consumption

•         Little maintenance requirements

•         Easy and safe cartridge replacement

•         Well-established refill and disposal concept - worldwide

•         Each module has a capacity of about 200LPM.

•         Customer sends a requisition note for new cartridges to IPI

•         The new cartridges are sent to the customer

•         The return transport of the spent absorber modules is organized by IPI

•         Reprocessing or disposal of spent granules by IPI

•         The customer receives a certificate of recycling/ disposal according to legal requirements

•         In the event of emissions from any toxic gas cylinder or leakage of toxic gas from any part of the semiconductor manufacturing system (piping, joints, valves, etc.), this equipment draws in the toxic gas and the surrounding air, passes them through the  cartridge for chemical adsorption and then reduces the concentrations of harmful components to the TLV (threshold limit value) or less.

•         The detoxifying agent to ensure safety in an emergency is a dry type to ensure efficient treatment even under higher airflow.

•         This series detoxifies highly toxic gases to TLV in a short period of time.

•         The system features an extremely low pressure loss, allowing the blower power to be reduced.

•         The entire system is compact-sized, reducing the required installation floor space.

•         The airflow can be automatically switched to emergency exhaust by the leakage signal input through the standard-supply inverter.

•         The detoxifying agent can be replaced easily.

•         The cartridge is equipped with a sampling cartridge to allow checking of residual detoxifying capability at any time.